Investigation on Wear- and Corrosion Resistance of TiN Films by CVD
TiN films have been deposited on K211 super alloy substrates by chemical vapor deposition (CVD) using a gaseous mixture of TiCl4, NH3, and Ar as carrier gas between 400 and 700°C. The films were characterized by means of scanning electron microscopy and energy dispersive spectrometer. In this paper, the wear and corrosion resistance of TiN coatings have been investigated by abrasive experiments and corrosion tests. It was shown that coated samples demonstrated significantly higher wear resistance than those uncoated by weight loss measurements in the test procedure. Under the conditions of the corrosion experiments, substrates with TiN coatings showed better corrosion resistance than uncoated samples and stainless steel.
Zhong Wei Gu, Yafang Han, Fu Sheng Pan, Xitao Wang, Duan Weng and Shaoxiong Zhou
C. Wang and C. G. Zhou, "Investigation on Wear- and Corrosion Resistance of TiN Films by CVD", Materials Science Forum, Vols. 610-613, pp. 554-558, 2009