Investigation on Wear- and Corrosion Resistance of TiN Films by CVD

Chao Wang; Chungen Zhou

doi:10.4028/www.scientific.net/MSF.610-613.554

Paper Titles

Formation Enthalpy, Free-Energy and Activity Coefficients of Sn-Pb Eutectic Solders
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Effect of the Content of Cu on Solderability and Mechanical Properties of Bi5Sb Solder Alloy
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Production and Properties of a 90%Si-Al Alloy for Electronic Packaging Applications
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Influence of Mg and Si in the Aluminum on the Thermo-Physical Properties of Pressureless Infiltrated SiCp/Al Composites
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Investigation on Wear- and Corrosion Resistance of TiN Films by CVD
p.554

Fabrication and Properties of Aluminum Nitide Ceramics Doped Carbon Nanotubes
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Investigation of Nano/Microcrystalline Diamond Composite Films for Thermal Applications
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Research of a Novel MEMS Vector Hydrophone Based on a New Package Process
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Fretting Tribology of Al₂O₃/Cu Composite Prepared by Powder Metallurgy
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HomeMaterials Science ForumMaterials Science Forum Vols. 610-613Investigation on Wear- and Corrosion Resistance of...

Investigation on Wear- and Corrosion Resistance of TiN Films by CVD

Abstract:

TiN films have been deposited on K211 super alloy substrates by chemical vapor deposition (CVD) using a gaseous mixture of TiCl4, NH3, and Ar as carrier gas between 400 and 700°C. The films were characterized by means of scanning electron microscopy and energy dispersive spectrometer. In this paper, the wear and corrosion resistance of TiN coatings have been investigated by abrasive experiments and corrosion tests. It was shown that coated samples demonstrated significantly higher wear resistance than those uncoated by weight loss measurements in the test procedure. Under the conditions of the corrosion experiments, substrates with TiN coatings showed better corrosion resistance than uncoated samples and stainless steel.