Atomistic Scale Modeling and Analysis of Sodium Enhanced Oxidation of Silicon Carbide

Aveek Chatterjee; Kevin Matocha

doi:10.4028/www.scientific.net/MSF.615-617.493

Paper Titles

Formation of Extended Defects in 4H-SiC Induced by Ion Implantation/Annealing
p.477

Diffusion of Point Defects from Ion Implanted 4H-SiC: Cathodoluminescence Observation
p.481

Structural and Electrical Properties of Poly-3C-SiC Layer Obtained from P Ion Implanted 4H-SiC
p.485

Model Calculation of SiC Oxide Growth Rate Based on the Silicon and Carbon Emission Model
p.489

Atomistic Scale Modeling and Analysis of Sodium Enhanced Oxidation of Silicon Carbide
p.493

Interface States in 4H- and 6H-SiC MOS Capacitors: A Comparative Study between Conductance Spectroscopy and Thermal Dielectric Relaxation Current Technique
p.497

Characterization of the SiO₂/SiC Interface with Impedance Spectroscopy
p.501

Characterization of 4H-SiC–SiO₂ Interfaces by a Deep Ultraviolet Spectroscopic Ellipsometer
p.505

Observation of SiC Oxidation in Ultra-Thin Oxide Regime by In Situ Spectroscopic Ellipsometry
p.509

HomeMaterials Science ForumMaterials Science Forum Vols. 615-617Atomistic Scale Modeling and Analysis of Sodium...

Atomistic Scale Modeling and Analysis of Sodium Enhanced Oxidation of Silicon Carbide

Abstract:

We explain the phenomenon of sodium enhanced oxidation (SEO) using computational techniques, and analyze a set of probable hypotheses, which can elucidate the observation of high inversion channel mobility achieved with SEO. The ability of the Na to screen the interface traps, reduce carbon cluster type of defect formation, and enhance the oxidation rate can be explained using these calculations. We observe an increased availability of electrons near the interface in the presence of Na. The sodium atom also helps in breaking the intramolecular oxygen bond. The electronic and atomic structure of the interface cluster, and electric field computations showed that the carbon cluster formed at the oxide side of the interface could be screened by the Na ion.