Electric Discharge Machining for Silicon Carbide in Gases of Ar, Ar-CH4 and Ar-CF4 Mixtures
We report on the discharge gas of the electric discharge machining (EDM) for silicon carbide (SiC) single crystal. We investigated the cutting speed and the kerf loss of EDM for SiC by using three kinds discharge gases: Ar, Ar+CH4(10%) and Ar+CF4(10%). The maximum cutting speed of EDM in Ar, Ar+CH4(10%) and Ar+CF4(10%) was 0.02mm/min, 0.04 mm/min and 0.06 mm/min, respectively. The kerf loss of EDM in Ar, Ar+CH4(10%) and Ar+CF4(10%) was 490m, 430m and 470m, respectively. It is shown that cutting with a smooth edge and low kerf loss is faster by mixing CH4 or CF4 in Ar.
Anton J. Bauer, Peter Friedrichs, Michael Krieger, Gerhard Pensl, Roland Rupp and Thomas Seyller
T. Sugimoto et al., "Electric Discharge Machining for Silicon Carbide in Gases of Ar, Ar-CH4 and Ar-CF4 Mixtures", Materials Science Forum, Vols. 645-648, pp. 869-872, 2010