Fabrication of VO₂ Film in the Spin-Coating Way

Abstract:

VO₂ thin films were obtained from V₂O₅ thin film in the thermal decompose process. V₂O₅ thin films were prepared in the spin-coating way and with V₂O₅ sol-gels as raw materials fabricated by the reformative inorganic sol-gel method. The effects of the viscosity of colloid on the fabrication of V₂O₅ film and the thermal decomposing temperature on the fabrication of VO₂ film were studied. The results show that the appropriate viscosity of colloid to obtain well-distributed V₂O₅ film was in the range of 30g/L-40g/L and suitable thermal decomposing temperature was about 500°C.

• Periodical: Materials Science Forum (Volumes 745-746)
• Pages: 90-95
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.745-746.90
• Online since: February 2013
• Authors: Guo Jian Jiang, Shu Ping Yao, Yun Ying Liu, Jia Yue Xu, Hui Shen, Min Jin, Gui Hua Peng
• Keywords: Sol-Gel (SG), Spin-Coating Way, VO₂ Thin Films

References

[1] F.J. Morin, Oxide which show a metal-to-insu1ator at the nee1 temperature, Phys Review Letter. 3 (1959) 34–36.

[2] D. Adler, Mechanisms for metal-nonmetal transitions in transition-metal oxides and sulfides, Rev. Mod. Phy. 40 (1968) 714-736.

DOI: 10.1103/revmodphys.40.714

[3] C.M. Lampert, Large-area smart glass and integrated photovoltaics, Solar Energy Mater. Sol. Cells. 76 (2003) 489-499.

DOI: 10.1016/s0927-0248(02)00259-3

[4] Wall Maria, Energy-efficient terrace houses in Sweden: simulations and measurements, Energy and Building. 38 (2006) 627-634.

DOI: 10.1016/j.enbuild.2005.10.005

[5] H. Elin, R. Arne, Antireflection treatment of low emitting glazings for energy efficient windows with high visible transmittance, Thin. Sol. Film. 442 (2003) 222-226.

DOI: 10.1016/s0040-6090(03)00986-6

[6] K. Takahashi, Ying Wang and Guozhong Cao, Growth and electrochromic properties of single-crystal V2O5 nanorod arrays, App. Phys. Lett. 86 (2005) 426-434.

DOI: 10.1063/1.1857087

[7] J.L. Tissot, Advanced IR detector technology development at CEA/LETI, Infra. Phys. Tec. 43 (2002) 223-228.

DOI: 10.1016/s1350-4495(02)00143-3

[8] L. Ottaviano, A. Pennisi, F. Simone, A.M. Salvi, RF sputtered electrochromic V2O5 films, Opt. Mat. 27 (2004) 307-313.

DOI: 10.1016/j.optmat.2004.04.001

[9] Libin Lin, Tiecheng Lu, Yong Lu, Phase-transition properties of vo2 thin films changed by high flux electron beam radiation, Surf. Coat. Technol. 158-159 (2002) 530-533.

DOI: 10.1016/s0257-8972(02)00298-0

[10] K. Kusano, Deposition of vanadium oxide films by direct current magnetron reactive sputtering, Vac Sci Technol. A. 6 (1988) 1663-1665.

[11] M. Nagashima, H. Wada, Near infrared optical properties of laser ablated VOx thin films by ellipsometry, Thin Solid Films . 312 (1998) 61-67.

DOI: 10.1016/s0040-6090(97)00360-x

[12] A.V. Hinskii, V.A. Klim, A.I. Sidorov, application of non-linear properties of transition metal compounds as optical limiters, IEEE 1lth international symposium on electrets, (2002).

DOI: 10.1109/ise.2002.1043000