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Impurity Detection Method for High-Purity BCl3

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Abstract:

A method for detecting impurities in high purity BCl3 was described in the present work. GC, ICP-MS, FTIR and colorimetric method were applied to analyze high-purity BCl3. The quantitative results of the impurities such as N2, CO, CO2 and Fe demonstrated that these methods had excellent repeatability (RSD<3%), reproducibility. The ICP-MS detection accuracy can achieve ppb limiter. The FTIR method provided opportunities for the determination of HCl, COCl2, which have difficulties in quantification with other method.

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Periodical:

Materials Science Forum (Volume 815)

Pages:

76-79

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.815.76

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Online since:

March 2015

Authors:

Yi Ni Shi*, Kai Pei, Yin Feng Zhao, Yun Tan, Zhen Tai, Lin Zhang, Yan Qiu Ji

Keywords:

Analysis, High Purity BCl3, Impurity Detection

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© 2015 Trans Tech Publications Ltd. All Rights Reserved

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References

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