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HomeMaterials Science ForumMaterials Science Forum Vol. 815Effect of Acetic Acid/Water Ratio on the...

Effect of Acetic Acid/Water Ratio on the Microstructure and Properties of LaNiO₃ Thin Films by Metal Organic Solution Deposition

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Abstract:

Highly (100)-oriented LaNiO₃ (LNO) thin films were prepared on p-type Si (100) substrates by metal organic solution deposition (MOSD). The LNO thin films were driven by series precursor solutions with different ratio of acetic acid to deionized water (R_aaw) and pH values. The dependences of viscosity, pH value and the thermal property of the gel-derived powders of the precursor solution on R_aaw values were systematically investigated. AFM images showed that R_aaw can dramatically influence the surface roughness. When R_aaw changed from 7:1 to 1:1, the surface roughness decreased from 3.695 nm to 1.488 nm. The resistivities of all the films are less than 2.1×10^-3Ω·cm. It shows that the precursor solution has strong effect on the microstructure of the thin films and relatively slight effect on the resistivity.

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Periodical:

Materials Science Forum (Volume 815)

Pages:

89-93

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.815.89

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Online since:

March 2015

Authors:

Yuan Yuan Zhang*, Xiao Dong Tang, Gen Shui Wang, Xian Lin Dong

Keywords:

Electrode, LaNiO₃, Perovskite

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© 2015 Trans Tech Publications Ltd. All Rights Reserved

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