Anomalous Damage Depths in Low-Energy Ion Beam Processed III-V Semiconductors

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Periodical:

Materials Science Forum (Volumes 83-87)

Edited by:

Gordon Davies, G.G. DeLeo and M. Stavola

Pages:

1439-1444

Citation:

S. J. Pearton et al., "Anomalous Damage Depths in Low-Energy Ion Beam Processed III-V Semiconductors", Materials Science Forum, Vols. 83-87, pp. 1439-1444, 1992

Online since:

January 1992

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$38.00

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