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HomeMaterials Science ForumMaterials Science Forum Vols. 83-87Anomalous Damage Depths in Low-Energy Ion Beam...

Anomalous Damage Depths in Low-Energy Ion Beam Processed III-V Semiconductors

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Defects in Semiconductors 16

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Periodical:

Materials Science Forum (Volumes 83-87)

Pages:

1439-1444

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.83-87.1439

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Online since:

January 1992

Authors:

Stephen J. Pearton, F. Ren, T.R. Fullowan, R.F. Kopf, W.S. Hobson, C.R. Abernathy, A. Katz, U.K. Chakrabarti, V. Swaminathan

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© 1992 Trans Tech Publications Ltd. All Rights Reserved

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