Chemical Stability of Si-SiC Nanostructures under Physiological Conditions

Romain Bange; Edwige Bano; Laetitia Rapenne; Sébastien Labau; Bernard Pelissier; Maxime Legallais; Bassem Salem; V. Stambouli

doi:10.4028/www.scientific.net/MSF.897.638

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HomeMaterials Science ForumMaterials Science Forum Vol. 897Chemical Stability of Si-SiC Nanostructures under...

Chemical Stability of Si-SiC Nanostructures under Physiological Conditions

Abstract:

The fast and direct detection of small quantities of biological and chemical species is of key importance for numerous biomedical applications. Extensive research has been conducted on nanoelectronic devices that can perform such detection with high sensitivity using silicon nanowires and nanostructures. However, it was recently demonstrated that Si material suffers a lack of long-term stability in physiological environments at nanometer scale [1,2], and is hence not suited for in situ sensing of biological molecules. The results presented here are two important steps toward the realization of core-shell Si-SiC NWFETs for the detection of biomolecules in liquid media. First, we show that SiC NWs exhibit higher chemical stability than Si NWs under physiological conditions. Second, we present the successful carburation of a thin film of Si resulting in a 3.6 nm thin SiC layer.

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Periodical:

Materials Science Forum (Volume 897)

Pages:

638-641

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.897.638

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Online since:

May 2017

Authors:

Romain Bange, Edwige Bano*, Laetitia Rapenne, Sébastien Labau, Bernard Pelissier, Maxime Legallais, Bassem Salem, V. Stambouli

Keywords:

Chemical Stability, DNA, Nanowire, NWFET, Sensor, Silicon, Silicon Carbide (SiC)

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