Preparation and Microstructure, Mechanical, Tribological Properties of Niobium Carbide Films

Kan Zhang; Su Xuan Du; Ping Ren; Chao Quan Hu; Mao Wen; Wei Tao Zheng

doi:10.4028/www.scientific.net/MSF.898.1498

Paper Titles

Microstructure and Properties of TiC Steel-Bonded Carbide Used Fe/Mo Pre-Alloyed Powder as Binder
p.1459

Effect of WC and Co on the Microstructure and Properties of TiC Steel-Bonded Carbide
p.1468

Selective Electrolytic Corrosion Behaviours of WC in WC-Co Cemented Carbide
p.1478

New Equipment for Production of Super Hard Spherical Tungsten Carbide and other High-Melting Compounds Using the Method of Plasma Atomization of Rotating Billet
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Preparation and Microstructure, Mechanical, Tribological Properties of Niobium Carbide Films
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Deposition and Characterization of Reactive Magnetron Sputtered Tungsten Carbide Films
p.1505

Effect of Micron-Scale SiO₂ Surface Coating on the Strength of Chemically Strengthened Glass
p.1512

Structure Stability and Mechanical Property of Y₂O₃ Thin Films Deposited by Reactive Magnetron Sputtering
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Thermomechanical and Thermal Gradient Mechanical Fatigue Lifetime of Thermal Barrier Coating Systems
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HomeMaterials Science ForumMaterials Science Forum Vol. 898Preparation and Microstructure, Mechanical,...

Preparation and Microstructure, Mechanical, Tribological Properties of Niobium Carbide Films

Abstract:

Niobium carbide films was deposited by direct current reactive magnetron sputtering on Si (001) substrates in discharging a mixture of CH₄/Ar gas. The effects of growth temperature (T_s) and methane flow rate (F_CH4) on the phase structure, composition, mechanical and tribological properties for NbC_x films were explored. For the film grown at F_CH4=6 sccm, a phase transition from cubic-NbC phase to hexagonal-Nb₂C phases occurred with increasing the T_s; In contrast, when the film deposited at F_CH4=16 sccm, only the cubic-NbC phase was observed at different T_s. The surface of all the films became rough with increasing the T_s. In addition, when the T_s increased from RT to 600 °C, the films exhibited the compressive stress and kept rising. While as the T_s > 600 °C, the stress partially relaxed both at F_CH4=6 sccm and F_CH4=16 sccm. The hardness (H) for sample grown at F_CH4=6 sccm first increased up to a maximum value, and then decreased with increasing the T_s. And the films grown at F_CH4=16 sccm kept decreasing with the maximum super-hard value of the filmsof 40.5 GPa at F_CH4=6 sccm and 600 °C. The friction coefficient for the film obtained at F_CH4=16 sccm was lower than that at F_CH4=6 sccm, which might be due to the presence more carbon in the film grown at F_CH4=16 sccm.

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Periodical:

Materials Science Forum (Volume 898)

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1498-1504

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https://doi.org/10.4028/www.scientific.net/MSF.898.1498

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Online since:

June 2017

Authors:

Kan Zhang, Su Xuan Du, Ping Ren, Chao Quan Hu, Mao Wen*, Wei Tao Zheng

Keywords:

Films, Hardness, Magnetron Sputtering, Niobium Carbide, Tribology

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