Optical Properties Evaluated According to the Different Thickness Sapphire under the Same Polishing Conditions

Abstract:

The sapphire substrate have a significant impact on reducing the light scattering loss and in accordance with the crystalline surface and can improve the light emission efficiency is the surface roughness of the sapphire LED is an important factor. When the CMP process after measuring the transmittance, haze, and surface roughness had a transmittance of 84% or more transmittance at all wavelengths, regardless of the thickness it was confirmed that the haze also has a low value, regardless of the thickness. Was confirmed that the surface roughness is greater the thicker the thickness of the sapphire it affects the pressure of the CMP polishing and then take a lot of importing a low surface roughness value of the thickness of the sapphire CMP process the surface roughness value.

• Periodical: Materials Science Forum (Volume 922)
• Pages: 80-85
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.922.80
• Online since: May 2018
• Authors: Ji Hoon Chae, Hyung Yu Lim, Bum Rae Cho*
• Keywords: CMP, Haze, Sapphire Wafer, Surface Roughness, Transmissivity

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