Optical Properties Evaluated According to the Different Thickness Sapphire under the Same Polishing Conditions

Abstract:

Article Preview

The sapphire substrate have a significant impact on reducing the light scattering loss and in accordance with the crystalline surface and can improve the light emission efficiency is the surface roughness of the sapphire LED is an important factor. When the CMP process after measuring the transmittance, haze, and surface roughness had a transmittance of 84% or more transmittance at all wavelengths, regardless of the thickness it was confirmed that the haze also has a low value, regardless of the thickness. Was confirmed that the surface roughness is greater the thicker the thickness of the sapphire it affects the pressure of the CMP polishing and then take a lot of importing a low surface roughness value of the thickness of the sapphire CMP process the surface roughness value.

Info:

Periodical:

Edited by:

Junichi Hojo, Tohru Sekino, Jian Feng Yang, Hyung Sun Kim and Wen Bin Cao

Pages:

80-85

Citation:

J. H. Chae et al., "Optical Properties Evaluated According to the Different Thickness Sapphire under the Same Polishing Conditions", Materials Science Forum, Vol. 922, pp. 80-85, 2018

Online since:

May 2018

Export:

Price:

$38.00

* - Corresponding Author

[1] H.C. Lee, Korean. J. Ceram., 14 (2011) 7.

[2] H. Tang, H. C. Li and J. Xu, Intech., 308 (2013).

[3] P. Kumar, J. Lee, G. Lee, S. Rao, D. Singh and R. K. Singh, Appl. Surf. Sci., 273 (2013).

[4] W. Xu, X. Lu, G. Pan, Y. Lei and J. Luo, Appl. Surf. Sci., 257(7), 2905 (2011).

[5] X. Hu, Z. Song, Z. Pan, W. Liu and L. Wu, Appl. Surf. Sci., 255, 8230 (2009).

Fetching data from Crossref.
This may take some time to load.