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HomeSolid State PhenomenaSolid State Phenomena Vols. 108-109Current Transport by Defects in Pr2O3 High K Films

Current Transport by Defects in Pr₂O₃ High K Films

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Gettering and Defect Engineering in Semiconductor Technology XI

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Periodical:

Solid State Phenomena (Volumes 108-109)

Pages:

717-722

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.108-109.717

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Online since:

December 2005

Authors:

Patrick Fiorenza, Raffaella Lo Nigro, Vito Raineri, Salvatore Lombardo

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© 2005 Trans Tech Publications Ltd. All Rights Reserved

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