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Modification of Silicon Oxide by High Energy Electron Beam

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Abstract:

During interaction between thin film SiO2 and electron beam with high power density, amorphous silicon dioxide modifies. Silicon nanoclusters are formed in radiated area. Result of this interaction is formation of Si/SiO2 nanocomposite. We studied modified SiO2 by TEM, microdiffraction and cathodoluminescence.

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Periodical:

Solid State Phenomena (Volumes 108-109)

Pages:

729-734

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.108-109.729

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Online since:

December 2005

Authors:

E.V. Kolesnikova, Alla A. Sitnikova, V.I. Sokolov, M.V. Zamoryanskaya

Keywords:

Cathodoluminescence, Electron-Beam, Modification of Silicon Oxide, Silicon Nanoclusters

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© 2005 Trans Tech Publications Ltd. All Rights Reserved

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