Iron Nanostructures Fabricated by Electron Beam Induced Deposition and its Magnetic Properties

Kazuo Furuya; Masaki Takeguchi; Kazutaka Mitsuishi

doi:10.4028/www.scientific.net/SSP.124-126.139

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HomeSolid State PhenomenaSolid State Phenomena Vols. 124-126Iron Nanostructures Fabricated by Electron Beam...

Iron Nanostructures Fabricated by Electron Beam Induced Deposition and its Magnetic Properties

Abstract:

Electron beam induced deposition (EBID) was carried out with gas introduction systems attached to field emission scanning electron microscope (FE-SEM). Using iron carbonyl and ferrocene, three dimensional (3-D) antenna structures were fabricated in the range of 30-50 nm in diameter and 500-1000 nm in size. Post-deposition annealing of iron nanostructures resulted in the formation of crystalline alpha-iron and iron carbide phases. The iron concentration was controlled by the partial pressure of iron carbonyl and ferrocene. Electron holography observation with field emission transmission electron microscopy (FE-TEM) revealed that the remanent magnetic flux density Br of the nanostructures also depends on the iron concentration.

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Solid State Phenomena (Volumes 124-126)

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139-142

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.124-126.139

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Online since:

June 2007

Authors:

Kazuo Furuya, Masaki Takeguchi, Kazutaka Mitsuishi

Keywords:

3-D Antenna Structure, EBID, Electron Holography, Ferrocene, Iron Carbonyl

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