Electrical and Thermal Properties of Platinum Thin Films Prepared by DC Magnetron Sputtering for Micro-Heater of Microsensor Applications after CMP Process

Nam Hoon Kim; Dong Myong Na; Pil Ju Ko; Jin Seong Park; Woo Sun Lee

doi:10.4028/www.scientific.net/SSP.124-126.267

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HomeSolid State PhenomenaSolid State Phenomena Vols. 124-126Electrical and Thermal Properties of Platinum Thin...

Electrical and Thermal Properties of Platinum Thin Films Prepared by DC Magnetron Sputtering for Micro-Heater of Microsensor Applications after CMP Process

Abstract:

Chemical mechanical polishing (CMP) of platinum thin films was performed for the improvement of surface morphology. Platinum thin films after CMP process with alumina slurry showed the increase of surface morphology without a remarkable difference of the thermal characteristics of as-annealed platinum thin films. The power consumption of platinum thin films micro-heater also became very low by improvement of surface morphology after CMP process. The similar or improved electrical and thermal characteristics of platinum thin films for micro-heater of sensor applications as well as evaluation possibility of sensing property by the improved surface morphology were obtained after CMP process.

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Periodical:

Solid State Phenomena (Volumes 124-126)

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267-270

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.124-126.267

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Online since:

June 2007

Authors:

Nam Hoon Kim, Dong Myong Na, Pil Ju Ko, Jin Seong Park, Woo Sun Lee

Keywords:

Chemical-Mechanical Planarization (CMP), Micro Heater, Microsensors, Platinum

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References

[1] G.S. Chung: Sensors Actuat. A-Phys. Vol. 112 (1) (2004), p.55.

Google Scholar

[2] N.H. Kim, G.W. Choi, Y.J. Seo and W.S. Lee: J. Vac. Sci. Technol. A Vol. 24 (4) (2006), p.1297.

Google Scholar

[3] Y. Kwon, N.H. Kim, G.P. Choi, W.S. Lee, Y.J. Seo and J. Park: Microelectron. Eng. Vol. 82 (3-4) (2005), p.314.

Google Scholar

[4] N.H. Kim Y. Kwon, G.P. Choi and J. Park: Electron. Lett. Vol. 41 (17) (2005), p.65.

Google Scholar

[5] F. Mailly, A. Giani, R. Bonnot, P. Temple-Boyer, F. Pascal-Delannoy, A. Foucaran and A. Boyer: Actuat. A-Phys. Vol. 94 (1-2) (2001), p.32.

DOI: 10.1016/s0924-4247(01)00668-9

Google Scholar

[6] Y.J. Seo, N.H. Kim, P.J. Ko, E.G. Chang, J. Park and W.S. Lee: J. Vac. Sci. Technol. A Vol. 23 (4) (2005), p.737.

Google Scholar

[7] Y.J. Seo, N.H. Kim, G.W. Choi, E.G. Chang, J. Park and W.S. Lee: J. Vac. Sci. Technol. A Vol. 23 (4) (2005), p.1133.

Google Scholar

[8] N.H. Kim, Y.J. Seo, P.J. Ko and W.S. Lee: Trans. EEM Vol. 6 (4) (2005), p.164.

Google Scholar

[9] S.Y. Kim, N.H. Kim, I.P. Kim, E.G. Chang, Y.J. Seo and H.S. Chung: Trans. EEM Vol. 4 (6) (2003), p.28.

Google Scholar

[10] N.H. Kim, Y.J. Seo and W.S. Lee: Microelectron. Eng. Vol. 83 (2) (2006), p.362.

Google Scholar

[11] J.E. Sundeen and R.C. Buchanan: Actuat. A-Phys. Vol. 90 (1-2) (2001), p.118.

Google Scholar