Synthesis and Fabrication of Novel Polymeric/Organic Materials for Micro/Nano-Scale Optical Printed Circuit Board and VLSI Photonic Integrated Circuit Application

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Abstract:

We report on the synthesis and fabrication of novel polymer/organic materials for application for what we call optical printed circuit board (O-PCB) for VLSI photonic circuit (VLSI-PIC). We synthesize copolymers containing cross-linkable pendant groups suitable for embossing and novel device fabrication. We also synthesize organic-inorganic hybrid materials of low optical absorption, good adhesion, low dielectric constant, high dielectric strength, high thermal stability, excellent photo-patterning possibility and variability of refractive index. Steps of synthesis and fabrication of these materials are described along with their optical, material, and performance characteristics. O-PCB and VLSI photonic circuit design and fabrication processes are also presented.

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Solid State Phenomena (Volumes 124-126)

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459-462

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June 2007

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© 2007 Trans Tech Publications Ltd. All Rights Reserved

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DOI: 10.1002/1521-4095(20021104)14:21<1585::aid-adma1585>3.0.co;2-s

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