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HomeSolid State PhenomenaSolid State Phenomena Vol. 134Plastic Containers Contamination by Volatile Acids...

Plastic Containers Contamination by Volatile Acids : Accumulation, Release and Transfer to Cu-Surfaces during Wafers Storage

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Ultra Clean Processing of Semiconductor Surfaces VIII

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Periodical:

Solid State Phenomena (Volume 134)

Pages:

251-254

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.134.251

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Online since:

November 2007

Authors:

Hervé Fontaine, Marc Veillerot

Keywords:

Airborn Molecular Contamination (AMC), Cross-Contamination, FOUP, Out-Gassing, Polymeric Materials

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© 2008 Trans Tech Publications Ltd. All Rights Reserved

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