Plastic Containers Contamination by Volatile Acids : Accumulation, Release and Transfer to Cu-Surfaces during Wafers Storage

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Periodical:

Solid State Phenomena (Volume 134)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

251-254

DOI:

10.4028/www.scientific.net/SSP.134.251

Citation:

H. Fontaine and M. Veillerot, "Plastic Containers Contamination by Volatile Acids : Accumulation, Release and Transfer to Cu-Surfaces during Wafers Storage", Solid State Phenomena, Vol. 134, pp. 251-254, 2008

Online since:

November 2007

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$35.00

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