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HomeSolid State PhenomenaSolid State Phenomena Vol. 134

Solid State Phenomena Vol. 134

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.134

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Paper Title Page

Acknowledgements

Etching of Silicon Dioxide with Gas Phase HF and Water: Initiation, Bulk Etching, and Termination.

Authors: Gerardo Montaño-Miranda, Anthony J. Muscat

3

Evaluation of the Plasmaless Gaseous Etching Process

Authors: Yoshiya Hagimoto, Hajime Ugajin, Daisuke Miyakoshi, Hayato Iwamoto, Yusuke Muraki, Takehiko Orii

7

Single Wafer Hydrophobic Surface Preparation on 300mm by HF Vapor

Authors: Thierry Salvetat, Olivier Pollet, Pascal Besson, Névine Rochat

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Insights into HF-Last Processes and Particle Performance in a Single Wafer Spin Cleaning Tool

Authors: Gim Chen, Ismail Kashkoush

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Implementing an In Situ Surface Preparation Prior to Ni Deposition for Ni Salicide Processes

Authors: Kyuh Wan Chang, Scott Bolton, Marc Rossow, Rich Gregory, Jack Jiang, Dharmesh Jawarani, Stefan Zollner, Dean Denning, Jon Cheek

19

Electrical Impact of Various Arsenic-Residues Cleanings

Authors: Y.S. Tan, S.P. Chiew, Z. Yang, Zainab Ismail, Felicia Goh, Christopher Lim, Vincent Sih, Ee Ping Yu, Goh Boon Cheng

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Elimination of Watermark on Extremely High-Doped Poly-Silicon Surfaces Using HF-Vapor Cleaning

Authors: Kang Heon Lee, John Ghekiere, Joon Bum Shim, Eric J. Bergman, Gyu Hyun Kim, Bai Kil Choi, Kee Joon Oh, Geun Min Choi

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Passivation Studies of Germanium Surfaces

Authors: Jung Yup Kim, Jim McVittie, Krishna Saraswat, Yoshio Nishi

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Germanium Surface Passivation Using Ozone Gaseous Phase

Authors: Virginie Loup, Pascal Besson, Olivier Pollet, Eugénie Martinez, Emmanuelle Richard, Sandrine Lhostis

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