A Study on Germanium as a Contaminant Source in Semiconductor Fabrication Process

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Periodical:

Solid State Phenomena (Volume 134)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

255-258

DOI:

10.4028/www.scientific.net/SSP.134.255

Citation:

D. W. Hwang et al., "A Study on Germanium as a Contaminant Source in Semiconductor Fabrication Process ", Solid State Phenomena, Vol. 134, pp. 255-258, 2008

Online since:

November 2007

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$35.00

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