Effect of Ozone Supply Methods on PRE in Alkaline Ozone Solutions

Abstract:

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Ozonated DI water was supplied to make alkaline cleaning solutions to replace SC1 chemicals in a bath with and without recirculation. With recirculation, low dissolved ozone and low pH cause lower particle removal efficiency (PRE) of 75%. However, direct supply of ozonated water with NH4OH to a bath without recirculation resulted in higher PRE over 93 %.

Info:

Periodical:

Solid State Phenomena (Volume 134)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

237-240

DOI:

10.4028/www.scientific.net/SSP.134.237

Citation:

S. H. Lee et al., "Effect of Ozone Supply Methods on PRE in Alkaline Ozone Solutions", Solid State Phenomena, Vol. 134, pp. 237-240, 2008

Online since:

November 2007

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Price:

$35.00

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