Effect of Ozone Supply Methods on PRE in Alkaline Ozone Solutions
Ozonated DI water was supplied to make alkaline cleaning solutions to replace SC1 chemicals in a bath with and without recirculation. With recirculation, low dissolved ozone and low pH cause lower particle removal efficiency (PRE) of 75%. However, direct supply of ozonated water with NH4OH to a bath without recirculation resulted in higher PRE over 93 %.
Paul Mertens, Marc Meuris and Marc Heyns
S. H. Lee et al., "Effect of Ozone Supply Methods on PRE in Alkaline Ozone Solutions", Solid State Phenomena, Vol. 134, pp. 237-240, 2008