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HomeSolid State PhenomenaSolid State Phenomena Vol. 134Is there Gas Entrapped on Submerged Silicon...

Is there Gas Entrapped on Submerged Silicon Wafers? Visualizing Nano-Scale Bubbles with Cavitation

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Ultra Clean Processing of Semiconductor Surfaces VIII

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Periodical:

Solid State Phenomena (Volume 134)

Pages:

225-228

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.134.225

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Online since:

November 2007

Authors:

Bram Borkent, Nicolas Bremond, Manish Arora, Claus Dieter Ohl, Detlef Lohse

Keywords:

Air Entrapment, Cavitation, Nanobubbles, Ultrasonic Cleaning

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© 2008 Trans Tech Publications Ltd. All Rights Reserved

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