Impact of Re-Gasified Water on Megasonic Cleaning

Abstract:

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Megasonic cleaning using de-gassed water (less than 2ppm N2, O2, CO2) in a 300mm batch immersion tool often does not give optimal particle performance, with particle streaks and clusters added onto the wafer, and low particle removal efficiency (PRE). When water was re-gasified with N2, the resultant stable cavitation activity reduced particle adders and increased PRE. With N2 concentration increased to just above 5ppm, number of particle adders decreased by three folds. Optimal particle performance could be obtained by operating at an N2 level close to saturation.

Info:

Periodical:

Solid State Phenomena (Volume 134)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

217-220

DOI:

10.4028/www.scientific.net/SSP.134.217

Citation:

B. C. Goh et al., "Impact of Re-Gasified Water on Megasonic Cleaning ", Solid State Phenomena, Vol. 134, pp. 217-220, 2008

Online since:

November 2007

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Price:

$35.00

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