Preparation, Characterization, and Damage-Free Processing of Advanced Multiple-Gate FETs

Abstract:

Article Preview

Info:

Periodical:

Solid State Phenomena (Volume 134)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

213-216

DOI:

10.4028/www.scientific.net/SSP.134.213

Citation:

J. M. Lauerhaas et al., "Preparation, Characterization, and Damage-Free Processing of Advanced Multiple-Gate FETs", Solid State Phenomena, Vol. 134, pp. 213-216, 2008

Online since:

November 2007

Export:

Price:

$35.00

In order to see related information, you need to Login.

In order to see related information, you need to Login.