Low Si Recess on Cleaning Process by Dilute HF/SC-1 with Megasonic

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Periodical:

Solid State Phenomena (Volume 134)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

209-212

DOI:

10.4028/www.scientific.net/SSP.134.209

Citation:

J. H. Cha et al., "Low Si Recess on Cleaning Process by Dilute HF/SC-1 with Megasonic ", Solid State Phenomena, Vol. 134, pp. 209-212, 2008

Online since:

November 2007

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$35.00

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