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HomeSolid State PhenomenaSolid State Phenomena Vol. 134Low Si Recess on Cleaning Process by Dilute...

Low Si Recess on Cleaning Process by Dilute HF/SC-1 with Megasonic

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Periodical:

Solid State Phenomena (Volume 134)

Pages:

209-212

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.134.209

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Online since:

November 2007

Authors:

Ji Hoon Cha, Chang Sup Mun, Dae Hyuk Kang, Woo Gwan Shim, Kuntack Lee, Chang Ki Hong, Han Ku Cho, Joo Tae Moon

Keywords:

Cleaning, HF, Megasonic, Particle, Recess, SC-1, Silicon

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© 2008 Trans Tech Publications Ltd. All Rights Reserved

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