Contamination Control in Si ULSI-Technology at the 1011cm-3 - Level and below

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Periodical:

Solid State Phenomena (Volumes 19-20)

Edited by:

M. Kittler and H. Richter

Pages:

109-120

DOI:

10.4028/www.scientific.net/SSP.19-20.109

Citation:

W. Bergholz et al., "Contamination Control in Si ULSI-Technology at the 1011cm-3 - Level and below", Solid State Phenomena, Vols. 19-20, pp. 109-120, 1991

Online since:

January 1991

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$35.00

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