Silicon Device Engineering by Intrinsic Point Defect Control

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Periodical:

Solid State Phenomena (Volumes 19-20)

Edited by:

M. Kittler and H. Richter

Pages:

169-174

DOI:

10.4028/www.scientific.net/SSP.19-20.169

Citation:

N.A. Sobolev et al., "Silicon Device Engineering by Intrinsic Point Defect Control", Solid State Phenomena, Vols. 19-20, pp. 169-174, 1991

Online since:

January 1991

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Price:

$35.00

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