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Simulation of Point-Defect Assisted Diffusion of Boron in RTA-Treated Silicon Wafers
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Dopant Deactivation and Electrically Active Defects Induced in Silicon by CF₄ and CBrF₃ Plasma Etching
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Formation and Properties of Metastable Silicide Precipitates in Silicon
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Mechanical Behaviour of Semiconductors in Terms of Dislocation Dynamics
p.295

Dislocation Kink Dynamics and Gettering Processes in Semiconductors
p.311

Local Distribution of Structure Defects Induced by Microhardness Indentation in GaAs
p.323

Dynamics of a Dislocation in the Potential Relief of Semiconductor Crystals under Varying Applied Forces
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Peculiarities of Dislocation Luminescence of Covalent Semiconductors
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Defects in Multicrystalline Silicon
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HomeSolid State PhenomenaSolid State Phenomena Vols. 19-20Dislocation Kink Dynamics and Gettering Processes...

Dislocation Kink Dynamics and Gettering Processes in Semiconductors

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Gettering and Defect Engineering in Semiconductor Technology IV

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Periodical:

Solid State Phenomena (Volumes 19-20)

Pages:

311-322

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.19-20.311

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Online since:

January 1991

Authors:

B.Ya. Farber, Yu.L. Iunin, V.I. Nikitenko, Valeri I. Orlov

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© 1991 Trans Tech Publications Ltd. All Rights Reserved

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