Direct Observations of Fe Impurities in Si with Different Fermi Levels by Mössbauer Spectroscopy

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Abstract:

The charge states of Fe interstitial atoms in Si are investigated by Mössbauer spectroscopy. The spectra of 57Fe-diffused Si wafers are measured directly after the deposition at room temperature. The Fermi levels are changed by applying the external voltages to a Schottky junction, and by using different Si wafers with different dopant concentrations, providing different fractions of interstitial Feint0 and Feint+ Mössbauer components which correspond to the isomer shifts of 0.40 and 0.80 mm/s, respectively.

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Solid State Phenomena (Volume 242)

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205-210

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October 2015

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© 2016 Trans Tech Publications Ltd. All Rights Reserved

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[1] A. A. Istratov, H. Hieslmair, and E. R Weber, Iron and its complexes in silicon, Appl. Phys. A 69 (1999) 13-44.

Google Scholar

[2] A. A. Istratov, H. Hieslmair, and E. R Weber, Iron contamination in silicon technology, Appl. Phys. A 70 (2000) 489-534.

DOI: 10.1007/s003390051074

Google Scholar

[3] G. Langouche, in: G. L. Long, F. Grandjean (Eds. ), Mössbauer Spectroscopy Applied to Inorganic Chemistry, vol. 3, Plenum Press, New York, London, 1989, p.445.

Google Scholar

[4] P. Schwarbach, S. Laubach, M. Hartick, E. kankeleit, B. Keck, M. Menningen, and R. Sielemann, Diffusion and isomer shift of interstitial iron in silicon observed via in-beam Mössbauer spectroscopy, Phys. Rev. Lett. 64 (1990) 1274-1477.

DOI: 10.1103/physrevlett.64.1274

Google Scholar

[5] H. P. Gunnlaugsson, G. Weyer, M. Dietrich, M. Fanciulli, K. Bharuth-Ram, R. Sielemann, and the ISOLDE Collaboration, Charge state dependence of the diffusivity of interstitial Fe in silicon detected by Mössbauer spectroscopy, Appl. Phys. Lett. 80 (2002).

DOI: 10.1063/1.1469216

Google Scholar

[6] Y. Yoshida, Y. Kobayashi, K. Yukihira, K. Hayakawa, K. Suzuki, A. Yoshida, H. Ueno, A. Yoshimi, K. Shimada, D. Nagae, K. Asahi and G. Langouche, 57Fe diffusion in n-type Si after GeV implantation of 57Mn, Physica B 401-402 (2007) 101-104.

DOI: 10.1016/j.physb.2007.08.122

Google Scholar

[7] Y. Yoshida, K. Suzuki, Y. Kobayashi, T. Nagatomo, Y. Akiyama, K. Yukihira, K. Hayakawa, H. Ueno, A. Yoshimi, D. Nagae, K. Asahi and G. Langouche, 57Fe Charge State in mc-Si Solar cells under Light Illumination After GeV-Implantation of 57Mn, Hyperfine Interactions, 204 (2012).

DOI: 10.1007/s10751-011-0424-3

Google Scholar

[8] Y. Yoshida, Y. Suzuki, A, Matsushita, K. Suzuki, and K. Sakata, Fermi level dependence of Mössbauer spectroscopic components corresponding to iron interstitials and their clusters in silicon, Physica B, 401-402 (2007) 176-170.

DOI: 10.1016/j.physb.2007.08.138

Google Scholar

[9] K. Sakata, K. Suzuki, and Y. Yoshida, Iron impurities in a p-n junction of Si wafer under external voltage, Silicon Forum 2007, Nov. 12-14, Niigata, Japan.

Google Scholar

[10] D. Gilles, W. Schroter, and W. Bergholz, Impact of the electronic structure on the solubility and diffusion of 3d transition elements in silicon, Phys. Rev. B 41 (1990) 5770-5782.

DOI: 10.1103/physrevb.41.5770

Google Scholar

[11] J. Kübler, A. E. Kumm, H. Overhof, P. Schwalbach, M. Hartick, E. Kankeleit, B. Keck, L. Wende, R. Sielemann, Isomer-shift of interstitial and substitutional iron in silicon and germanium, Z. Phys. B 92 (1993) 155-162.

DOI: 10.1007/bf01312171

Google Scholar