Dry Cleaning of Silicon Wafers in a Low Energy Hydrogen Plasma

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Periodical:

Solid State Phenomena (Volumes 32-33)

Edited by:

H.G. Grimmeiss, M. Kittler and H. Richter

Pages:

111-116

DOI:

10.4028/www.scientific.net/SSP.32-33.111

Citation:

J. Ramm et al., "Dry Cleaning of Silicon Wafers in a Low Energy Hydrogen Plasma", Solid State Phenomena, Vols. 32-33, pp. 111-116, 1993

Online since:

December 1993

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Price:

$35.00

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