Fermi-Level Shifts Caused by Reactions of Intrinsic Defects at 450°C - 540°C in FZ- and Cz-Silicon Supersaturated with Platinum- An Electron Paramagnetic Resonance Study

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Periodical:

Solid State Phenomena (Volumes 47-48)

Edited by:

H. Richter, M. Kittler and C. Claeys

Pages:

293-298

DOI:

10.4028/www.scientific.net/SSP.47-48.293

Citation:

J. Juda and M. Höhne, "Fermi-Level Shifts Caused by Reactions of Intrinsic Defects at 450°C - 540°C in FZ- and Cz-Silicon Supersaturated with Platinum- An Electron Paramagnetic Resonance Study", Solid State Phenomena, Vols. 47-48, pp. 293-298, 1996

Online since:

July 1995

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$35.00

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