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HomeSolid State PhenomenaSolid State Phenomena Vols. 47-48Point Defect Concentrations, Distributions and...

Point Defect Concentrations, Distributions and Diffusivity in Thin Si MBE-Films: Experiments and Simulations Based on Profiling of Implanted Multiple Delta Doping Structures

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Gettering and Defect Engineering in Semiconductor Technology VI

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Periodical:

Solid State Phenomena (Volumes 47-48)

Pages:

313-318

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.47-48.313

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Online since:

July 1995

Authors:

D. Krüger, R. Kurps, H.P. Zeindl, U. Jagdhold

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© 1996 Trans Tech Publications Ltd. All Rights Reserved

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