Point Defect Concentrations, Distributions and Diffusivity in Thin Si MBE-Films: Experiments and Simulations Based on Profiling of Implanted Multiple Delta Doping Structures

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Periodical:

Solid State Phenomena (Volumes 47-48)

Edited by:

H. Richter, M. Kittler and C. Claeys

Pages:

313-318

DOI:

10.4028/www.scientific.net/SSP.47-48.313

Citation:

D. Krüger et al., "Point Defect Concentrations, Distributions and Diffusivity in Thin Si MBE-Films: Experiments and Simulations Based on Profiling of Implanted Multiple Delta Doping Structures", Solid State Phenomena, Vols. 47-48, pp. 313-318, 1996

Online since:

July 1995

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$35.00

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