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HomeSolid State PhenomenaSolid State Phenomena Vols. 51-52Investigations for the Detection of Microdefects...

Investigations for the Detection of Microdefects in Cast Multicrystalline Silicon

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Polycrystalline Semiconductors IV

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Periodical:

Solid State Phenomena (Volumes 51-52)

Pages:

87-92

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.51-52.87

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Online since:

May 1996

Authors:

E. Wolf, D. Klinger, S. Bergmann

Keywords:

Chemomechanical Polishing, Cooper and Iron Decoration, Microdefects, Optical Microscopy, Preferential Etching, Structural Characterisation

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© 1996 Trans Tech Publications Ltd. All Rights Reserved

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