Defect Engineering in SOI-Structures Formed by High Dose Implantation of Reactive Ions

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Periodical:

Solid State Phenomena (Volumes 6-7)

Edited by:

M. Kittler

Pages:

565-570

DOI:

10.4028/www.scientific.net/SSP.6-7.565

Citation:

W. Skorupa "Defect Engineering in SOI-Structures Formed by High Dose Implantation of Reactive Ions", Solid State Phenomena, Vols. 6-7, pp. 565-570, 1989

Online since:

January 1989

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$35.00

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