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HomeSolid State PhenomenaSolid State Phenomena Vols. 6-7Defect Control in Thick SOI-Films Produced by Zone...

Defect Control in Thick SOI-Films Produced by Zone Melting Recrystallization

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Gettering and Defect Engineering in Semiconductor Technology III

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Periodical:

Solid State Phenomena (Volumes 6-7)

Pages:

579-584

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.6-7.579

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Online since:

January 1989

Authors:

Bernd Tillack, K. Hoeppner, H.H. Richter, R. Banisch

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© 1989 Trans Tech Publications Ltd. All Rights Reserved

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