Vacancy-Gettering in Silicon: Cavities and Helium-Implantation

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Periodical:

Solid State Phenomena (Volumes 69-70)

Edited by:

H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter

Pages:

229-234

DOI:

10.4028/www.scientific.net/SSP.69-70.229

Citation:

F. Corni et al., "Vacancy-Gettering in Silicon: Cavities and Helium-Implantation", Solid State Phenomena, Vols. 69-70, pp. 229-234, 1999

Online since:

August 1999

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Price:

$35.00

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