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HomeSolid State PhenomenaSolid State Phenomena Vols. 69-70Oxygen and Peculiarities of its Precipitation in...

Oxygen and Peculiarities of its Precipitation in Si<Ge>

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Gettering and Defect Engineering in Semiconductor Technology VIII

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Periodical:

Solid State Phenomena (Volumes 69-70)

Pages:

215-220

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.69-70.215

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Online since:

August 1999

Authors:

Lyudmila I. Khirunenko, Yu.V. Pomozov, Mikhail G. Sosnin, Nikolay V. Abrosimov, M. Höhne, W. Schröder

Keywords:

Germanium, Oxygen, Silicon, Solid Solution, Thermal Donor

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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