X-Ray Diffraction Studies of the Influence of Substitutional Carbon on Si/Ge Interdiffusion in SiGe/Si Superlattices

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Periodical:

Solid State Phenomena (Volumes 69-70)

Edited by:

H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter

Pages:

203-208

DOI:

10.4028/www.scientific.net/SSP.69-70.203

Citation:

P. Zaumseil and H. Rücker, "X-Ray Diffraction Studies of the Influence of Substitutional Carbon on Si/Ge Interdiffusion in SiGe/Si Superlattices", Solid State Phenomena, Vols. 69-70, pp. 203-208, 1999

Online since:

August 1999

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$35.00

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