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HomeSolid State PhenomenaSolid State Phenomena Vols. 69-70Interaction between Point Defects and Dislocations...

Interaction between Point Defects and Dislocations in SiGe

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Gettering and Defect Engineering in Semiconductor Technology VIII

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Periodical:

Solid State Phenomena (Volumes 69-70)

Pages:

179-184

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.69-70.179

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Online since:

August 1999

Authors:

Klara Lyutovich, F. Ernst, Erich Kasper, Monika Bauer, Michael Oehme

Keywords:

Epitaxy, Low Temperature Growth, Misfit Stress Relaxation, Point Defect

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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