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HomeSolid State PhenomenaSolid State Phenomena Vols. 69-70The Peculiarities of a Non-Stationary Growth...

The Peculiarities of a Non-Stationary Growth Kinetics in GSMBE and their Influence on Si/ Si_1-xGe_x Interfaces Abruptness

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Periodical:

Solid State Phenomena (Volumes 69-70)

Pages:

221-228

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.69-70.221

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Online since:

August 1999

Authors:

L.K. Orlov, A.V. Potapov, S.V. Ivin

Keywords:

Growth Kinetic, GSMBE, Interface Abruptness, Non-Stationary Process, Si/Si_1-xGe_x Structure

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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