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HomeSolid State PhenomenaSolid State Phenomena Vols. 69-70Surface Gettering Background Impurities and...

Surface Gettering Background Impurities and Defects in GaAs Plates

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Gettering and Defect Engineering in Semiconductor Technology VIII

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Periodical:

Solid State Phenomena (Volumes 69-70)

Pages:

279-284

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.69-70.279

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Cite this paper

Online since:

August 1999

Authors:

N. Shmidt, A.T. Gorelenok, Valentin V. Emtsev, Alex A. Kamanin, A.V. Markov, M. Mezdrogina, D.S. Poloskin, L. Vlasenko

Keywords:

Acceptor, Defect, Donors, GaAs, Gettering, Heat Treatment, Impurity, Microwave Photoconductivity, Y

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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