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HomeSolid State PhenomenaSolid State Phenomena Vols. 69-70About the Electrical Properties of Oxygen Phases...

About the Electrical Properties of Oxygen Phases Segregated by Annealing Cz Silicon in the 600-800°C Range

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Gettering and Defect Engineering in Semiconductor Technology VIII

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Periodical:

Solid State Phenomena (Volumes 69-70)

Pages:

327-332

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.69-70.327

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Online since:

August 1999

Authors:

Eugene B. Yakimov, Olga V. Feklisova, Maurizio Acciarri, Anna Cavallini, Sergio Pizzini

Keywords:

DLTS, Energy Spectrum, Oxygen Precipitation, Silicon, Thermal Donor

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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