Grown-in Defects in High Temperature Annealed Si Wafers

Abstract:

Article Preview

Info:

Periodical:

Solid State Phenomena (Volumes 69-70)

Edited by:

H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter

Pages:

73-82

Citation:

N. Tsuchiya et al., "Grown-in Defects in High Temperature Annealed Si Wafers", Solid State Phenomena, Vols. 69-70, pp. 73-82, 1999

Online since:

August 1999

Export:

Price:

$38.00

Fetching data from Crossref.
This may take some time to load.