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Grown-in Defects in High Temperature Annealed Si Wafers
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Hydrogen Platelets in Crystalline Silicon - Precursors for the 'Smart Cut'
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Relaxation of Misfit Induced Strain in Si-Based Heterostructures
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HomeSolid State PhenomenaSolid State Phenomena Vols. 69-70Hydrogen Platelets in Crystalline Silicon -...

Hydrogen Platelets in Crystalline Silicon - Precursors for the 'Smart Cut'

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Gettering and Defect Engineering in Semiconductor Technology VIII

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Periodical:

Solid State Phenomena (Volumes 69-70)

Pages:

83-92

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.69-70.83

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Online since:

August 1999

Authors:

Sokrates T. Pantelides, F.A. Reboredo

Keywords:

H, Hydrogenated Vacancies, Platelets, Silicon, Smart-Cut

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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