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HomeSolid State PhenomenaSolid State Phenomena Vols. 76-77Improved Phosphoric Acid Mixtures for Nitride...

Improved Phosphoric Acid Mixtures for Nitride Strip

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Ultra Clean Processing of Silicon Surfaces V

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Periodical:

Solid State Phenomena (Volumes 76-77)

Pages:

43-46

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.76-77.43

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Online since:

January 2001

Authors:

Rita Vos, Marcel Lux, Thierry Conard, H. De Witte, Paul W. Mertens, Marc Heyns, Z. Hatcher

Keywords:

Nitride Etch Selectivity, Oxide Etch Selectivity, Particle Removal, Wafer Cleaning

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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