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HomeSolid State PhenomenaSolid State Phenomena Vols. 76-77New Aqueous Clean for Aluminum Interconnects: Part...

New Aqueous Clean for Aluminum Interconnects: Part I. Fundamentals

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Ultra Clean Processing of Silicon Surfaces V

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Periodical:

Solid State Phenomena (Volumes 76-77)

Pages:

31-34

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.76-77.31

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Online since:

January 2001

Authors:

D.L. Rath, R. Ravikumar, D.J. Delehanty, R.G. Filippi, E.W. Kiewra, G. Stojakovic, K.J. McCullough, D.D. Miura, B.N. Rhoads

Keywords:

Aqueous Acid, DRAMs, Galvanic Corrosion, Passivation, Post Al RIE Clean

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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