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HomeSolid State PhenomenaSolid State Phenomena Vols. 76-77Wettability Modification of Polysilicon for...

Wettability Modification of Polysilicon for Stiction Reduction in Silicon Based Micro-electromechanical Structures

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Ultra Clean Processing of Silicon Surfaces V

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Periodical:

Solid State Phenomena (Volumes 76-77)

Pages:

23-26

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.76-77.23

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Online since:

January 2001

Authors:

Angeles Marcia Almanza-Workman, Srini Raghavan, Pierre Deymier, David J. Monk, Ray Roop

Keywords:

Poly-Silicon, Self-Assembled Monolayer (SAM), Stiction, Water Dispersible Silanes

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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