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Formation and Current-Voltage Characteristics of SiC/Si-dot/SiC Resonant Tunneling Diodes
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Excitonic Emission from High-Quality Homoepitaxial Diamond Film
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HomeSolid State PhenomenaSolid State Phenomena Vols. 78-79Semiconductor Inspection System for Yield...

Semiconductor Inspection System for Yield Enhancement

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Abstract:

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Beam Injection Assessment of Microstructures in Semiconductors

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Periodical:

Solid State Phenomena (Volumes 78-79)

Pages:

149-156

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.78-79.149

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Online since:

April 2001

Authors:

Y. Usami, I. Kawata

Keywords:

0.1μm Process, Defect Review, Semiconductor Inspection, Yield

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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