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HomeSolid State PhenomenaSolid State Phenomena Vols. 78-79Defect Characteristics in Sulfur-Implanted CVD...

Defect Characteristics in Sulfur-Implanted CVD Homoepitaxial Diamond

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Periodical:

Solid State Phenomena (Volumes 78-79)

Pages:

171-176

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.78-79.171

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Online since:

April 2001

Authors:

Mitsuru Hasegawa, M. Ogura, Daisuke Takeuchi, Sadanori Yamanaka, Hideyuki Watanabe, Shien Ri, Naoto Kobayashi, Hideyo Okushi, Takashi Sekiguchi

Keywords:

Annealing, Cathodoluminescence, CVD Homoepitaxial Diamond, Defect, Ion Channeling, Ion Implantation, Lattice Location, PIXE, Substitutional Fraction, Sulfur

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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