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HomeSolid State PhenomenaSolid State Phenomena Vols. 78-79Surface Characterization of Plasma Etched DLC...

Surface Characterization of Plasma Etched DLC Films by Scanning Tunneling Microscopy and Atomic Force Microscopy

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Periodical:

Solid State Phenomena (Volumes 78-79)

Pages:

183-190

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.78-79.183

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Online since:

April 2001

Authors:

E.R. Hwang, W. Choi, Y. Iseri, H. Tomokage

Keywords:

Diamond-Like Carbon (DLC), Reactive Ion Etching, Sputter Etching, Surface Roughness (SR)

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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