Surface Characterization of Plasma Etched DLC Films by Scanning Tunneling Microscopy and Atomic Force Microscopy

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Periodical:

Solid State Phenomena (Volumes 78-79)

Edited by:

H. Tomokage and T. Sekiguchi

Pages:

183-190

DOI:

10.4028/www.scientific.net/SSP.78-79.183

Citation:

E.R. Hwang et al., "Surface Characterization of Plasma Etched DLC Films by Scanning Tunneling Microscopy and Atomic Force Microscopy", Solid State Phenomena, Vols. 78-79, pp. 183-190, 2001

Online since:

April 2001

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$35.00

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