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HomeSolid State PhenomenaSolid State Phenomena Vols. 78-79MC-IR-LST and TEM Combined Analysis of Defects in...

MC-IR-LST and TEM Combined Analysis of Defects in the OSF-Ring of Cz-Silicon Crystals

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Beam Injection Assessment of Microstructures in Semiconductors

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Periodical:

Solid State Phenomena (Volumes 78-79)

Pages:

211-216

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.78-79.211

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Online since:

April 2001

Authors:

Cesare Frigeri, M. Ma, T. Irisawa, Tomoya Ogawa

Keywords:

CZ-Si Crystal, Light Scattering Tomography, Oxidation Induced Stacking Fault Ring, Oxygen Precipitates, Photoluminescence (PL), TEM

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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