MC-IR-LST and TEM Combined Analysis of Defects in the OSF-Ring of Cz-Silicon Crystals
p.211
p.211
An In-Situ Observation of Dislocations and Crystal-Melt Interface during the Melting of Silicon
p.217
p.217
Negative Photoconductivity in Polycrystalline Silicon Films Doped with Phosphorus
p.225
p.225
Effects of Lattice Defects on Degradation of Flash Memory Cell
p.231
p.231
Electron Beam Induced Current Contrast of Oxygen Precipitation Related Defects in Czochralski Silicon
p.237
p.237
Modeling the Influence of Dislocations on Minority Carrier Diffusion Length in Silicon as a Function of Dislocation Contamination
p.253
p.253
Defect Characterization in Multicrystalline Silicon Using Scanning Techniques
p.259
p.259
Minority Carrier Lifetime Scan Maps Applied to Metallic Impurity Detection in Silicon Wafers
p.267
p.267
Surface Concentration Dependence of Diffusion Profile Shape for Phosphorus in Si
p.275
p.275
Electron Beam Induced Current Contrast of Oxygen Precipitation Related Defects in Czochralski Silicon
Abstract:
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Periodical:
Solid State Phenomena (Volumes 78-79)
Pages:
237-252
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Online since:
April 2001
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© 2001 Trans Tech Publications Ltd. All Rights Reserved
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